Applied Physics seminar: Heterogeneous Integration of Nanomaterials - Towards CMOS Based Multi-Gas Sensing Nanodevices


Indoor and outdoor air quality monitoring is a big issue for health and well-being. CMOS integration will be the key to realize chemical nanosensors, which can be implemented in consumer electronic devices to serve these important applications. A worldwide unique CMOS based chemical sensor device comprising an array of 8 micro-hotplates for a total of 16 chemical sensors on a single chip will be presented. Ultrathin metal oxide films (SnO2, ZnO, CuO) are heterogeneously integrated on the device by spray pyrolysis technology, photolithography and etching. Subsequently these films are functionalized with mono-, bi, and tri-metallic nanoparticles such as Au, NiPt, and PdRuAg in order to improve device performance such as sensitivity and selectivity. Aspects of nanomaterial integration as well as 3D-system integration approaches will be presented and discussed.



Anton Köck received his master’s degree (1986) and PhD (1989) in Experimental Physics at the University of Innsbruck, Austria. After a 4-years Post Doc position at the Walter Schottky Institute, Technical University Munich, he was head of the Optoelectronics research group from 1993 to 1997 at the Institute for Solid State Electronics, Vienna University of Technology, where he habilitated in the field of Optoelectronics in 1998. Then he was professor for Physics and Material Science at the Wiener Neustadt University for Applied Sciences, where he was heading the MEMS research group. From 2004 to 2013 he was Deputy Head of the business unit Nano Systems, Austrian Institute of Technology (AIT) in Vienna, where he established the research on gas sensors based on nanomaterials. Since 08/2013 he is Key Researcher at the Materials Center Leoben (MCL) in the microelectronics department and is head of the sensor research group. Anton Koeck has more than 250 publications and conference contributions, has been coordinator of the FP7-project “MSP – Multi Sensor Platform for Smart Building Management” (1.9.2013 – 30.4.2017, Project No. 611887, FP7-ICT-2013-10) and has been the General Conference Chair of the EUROSENSORS 2018 conference.